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Parker FR1001S9K2PFS6MM - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1001S9K2PFS6MM

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Products specifications

Attribute name	Attribute value
Internal Leak Rate	4 x 10 -8 scc/sec He	Filter Material	Hastelloy C-22®
Poppet Material	316L Stainless Steel	Maximum Inlet Pressure Rating	3500
Options	na	Flow Coefficient	0.09
Port Type	3/8" Face Seal	Operating Temperature	-40°F to 150°F (-40°C to 66°C)
Body Material	316L Stainless Steel	Division	Veriflo Division
Volume	0.49	Seat Material	PCTFE
Outlet Pressure Rating	1-10 psig	Number of Ports	2
Port Connection	Male, Male	Diaphragm Material	Hastelloy C-22®
Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)	Number of Ports	2
Port Connection	Male, Male	Body Material	316L Stainless Steel
Outlet Pressure	1-10 psig	Port Connection Type	3/8" Face Seal
Flow Coefficient (Cv)	0.09

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