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Parker FR1001S15K2PFS6MM - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1001S15K2PFS6MM

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Products specifications

Attribute name	Attribute value
Maximum Inlet Pressure Rating	3500	Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)
Port Connection	Male, Male	Operating Temperature	-40°F to 150°F (-40°C to 66°C)
Options	na	Port Type	3/8" Face Seal
Outlet Pressure Rating	1-10 psig	Volume	0.49
Seat Material	PCTFE	Division	Veriflo Division
Body Material	316L Stainless Steel	Diaphragm Material	Hastelloy C-22®
Number of Ports	2	Filter Material	Hastelloy C-22®
Internal Leak Rate	4 x 10 -8 scc/sec He	Flow Coefficient	0.15
Poppet Material	316L Stainless Steel	Flow Coefficient (Cv)	0.15
Outlet Pressure	1-10 psig	Port Connection	Male, Male
Body Material	316L Stainless Steel	Number of Ports	2
Port Connection Type	3/8" Face Seal

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