Parker FR1001D9V2PFS6MMTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications
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Brand Parker
Part No. FR1001D9V2PFS6MMTH
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Products specifications
Attribute nameAttribute value
Port ConnectionMale, MaleSurface Finish10 Ra microinch (.25 micrometer), 25 Ra (Optional)
Diaphragm MaterialHastelloy C-22®Number of Ports2
Poppet Material316L Stainless SteelVolume0.49
Seat MaterialPCTFEDivisionVeriflo Division
Outlet Pressure Rating1-10 psigOptionsHastelloy Trim (Poppet)
Body Material316L Stainless Steel Double MeltInternal Leak Rate4 x 10 -8 scc/sec He
Filter MaterialHastelloy C-22®Flow Coefficient0.09
Operating Temperature-40°F to 150°F (-40°C to 66°C)Port Type3/8" Face Seal
Maximum Inlet Pressure Rating3500Body Material316L Stainless Steel Double Melt
Number of Ports2Flow Coefficient (Cv)0.09
Port Connection Type3/8" Face SealOutlet Pressure1-10 psig
Port ConnectionMale, Male
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