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Parker FR1001D15V2PFSFFTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications

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Brand Parker

Part No. FR1001D15V2PFSFFTH

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Products specifications

Attribute name	Attribute value
Maximum Inlet Pressure Rating	3500	Port Connection	Female, Female
Number of Ports	2	Surface Finish	10 Ra microinch (.25 micrometer), 25 Ra (Optional)
Diaphragm Material	Hastelloy C-22®	Operating Temperature	-40°F to 150°F (-40°C to 66°C)
Poppet Material	316L Stainless Steel	Division	Veriflo Division
Outlet Pressure Rating	1-10 psig	Port Type	1/4" Face Seal
Volume	0.49	Seat Material	PCTFE
Body Material	316L Stainless Steel Double Melt	Options	Hastelloy Trim (Poppet)
Internal Leak Rate	4 x 10 -8 scc/sec He	Filter Material	Hastelloy C-22®
Flow Coefficient	0.15	Port Connection Type	1/4" Face Seal
Flow Coefficient (Cv)	0.15	Number of Ports	2
Port Connection	Female, Female	Body Material	316L Stainless Steel Double Melt
Outlet Pressure	1-10 psig

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