Parker FR1001D15V2PFS6MMTH - UHP Single Stage Pressure Reducing Regulator - FR1000 Series

The FR1000 is an ultrahigh purity regulator for gas delivery in semiconductor and other clean processes. With low to intermediate flow, it is an excellent choice for valve manifold boxes, gas cabinets, and other semiconductor manufacturing applications
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Brand Parker
Part No. FR1001D15V2PFS6MMTH
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Products specifications
Attribute nameAttribute value
Poppet Material316L Stainless SteelFlow Coefficient0.15
Outlet Pressure Rating1-10 psigVolume0.49
Seat MaterialPCTFEDivisionVeriflo Division
OptionsHastelloy Trim (Poppet)Internal Leak Rate4 x 10 -8 scc/sec He
Body Material316L Stainless Steel Double MeltFilter MaterialHastelloy C-22®
Operating Temperature-40°F to 150°F (-40°C to 66°C)Port Type3/8" Face Seal
Maximum Inlet Pressure Rating3500Number of Ports2
Diaphragm MaterialHastelloy C-22®Port ConnectionMale, Male
Surface Finish10 Ra microinch (.25 micrometer), 25 Ra (Optional)Number of Ports2
Port ConnectionMale, MaleOutlet Pressure1-10 psig
Port Connection Type3/8" Face SealFlow Coefficient (Cv)0.15
Body Material316L Stainless Steel Double Melt
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