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Parker 930MSFSMF - Ultra-High Purity (UHP) Low Flow, Low Pressure Diaphragm Valve – 930 Series

The 930 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.

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Brand Parker

Part No. 930MSFSMF

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Products specifications

Attribute name	Attribute value
Division	Veriflo Division	Inlet Connection	1/4" Face Seal, Male
Actuation Type	Manual, Mini-lever	Maximum Operating Pressure	300 psig
Outlet Connection	1/4" Face Seal, Female	Flow Coefficient	0.22

Product resources

Literature and Reference Materials

Veriflo CAD File Locator Guide (PDF)
Veriflo Product Selection & Operation Safety Guide (PDF)